edited by H. Baltes et al.
Enabling Technology for MEMS and Nanodevices takes a close look at enabling technologies, the first section on MEMS featuring an introduction to the challenges and benefits of three-dimensional silicon processing.
An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means off scanning micro- and nanoprobes.
The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.
Contents:
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