Enabling Technology for MEMS and Nanodevices takes a close look at enabling technologies, the first section on MEMS featuring an introduction to the challenges and benefits of three-dimensional silicon processing.

An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means off scanning micro- and nanoprobes.

The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.

Contents:

1. M³: the third dimension of silicon
2. Trends in MEMS commercialization
3. Capacitive interfaces for MEMS
4. Packaging of advanced micro- and nanosystems
5. High-frequency integrated microelectromechanical resonators and filters
6. MEMS in mass storage systems
7. Scanning micro- and nanoprobes for electrochemical imaging
8. Nanofluidic modeling and simulation
9. Nanofluidics - structures and devices
10. Carbon nanotubes and sensors : a review
11. CMOS-based DNA sensor arrays

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