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Nanotechnology Book from C.H.I.P.S.

Microengineering, MEMS, and Interfacing
A Practical Guide
by Daniel John Banks

Microengineering, MEMS, and Interfacing provides a straightforward, down-to-earth overview of the current state of MEMS technology.

Features:

  • Presents a non-technical introduction to MEMS fabrication, design, and integration techniques for application in a variety of areas
  • Covers mask design and silicon micromachining in detail
  • Offers qualitative comparisons of many materials and processes (both silicon and nonsilicon)
  • Includes abundant line drawings and micrographs to illustrate the discussion
  • Devotes a chapter to nanotechnology and its relation to the current state of microengineering

Contents

Photolithography

  • UV Photolithography
  • X-Ray Lithography
  • Direct-Write (E-Beam) Lithography
  • Low-Cost Photolithography
  • Photolithography-Key Points

Silicon Micromachining

  • Silicon
  • Crystal Growth
  • Doping
  • Wafer Specifications
  • Thin Films
  • Structures in Silicon
  • Wafer Dicing

Nonsilicon Processes

  • Chemical-Mechanical Polishing
  • LIGA and Electroplating
  • Photochemical Machining
  • Laser Machining
  • Polymer Microforming
  • Electrical Discharge Machining
  • Photostructurable Glasses
  • Precision Engineering

Mask Design

  • Minimum Feature Size
  • Layout Software
  • Design
  • Design Rules
  • Getting the Masks Produced
  • Generating Gerber Files
  • Mask Design-Key Points

Microsensors

  • Thermal Sensors
  • Radiation Sensors
  • Magnetic Sensors
  • Chemical Sensors and Biosensors
  • Microelectrodes for Neurophysiology
  • Mechanical Sensors

Microactuators

  • Electrostatic Actuators
  • Magnetic Actuators
  • Piezoelectric Actuators
  • Thermal Actuators
  • Hydraulic Actuators
  • Multilayer Bonded Devices
  • Microstimulators

Micro Total Analysis Systems

  • Basic Chemistry
  • Applications of Microengineered Devices in Chemistry and Biochemistry
  • Micro Total Analysis Systems
  • DNA Chips
  • The Polymerase Chain Reaction (PCR)
  • Conducting Polymers and Hydrogels

Integrated Optics

  • Waveguides
  • Integrated Optics Components
  • Fiber Coupling

Assembly and Packaging

  • Assembly
  • Passivation
  • Prepackage Testing
  • Packaging
  • Wire Bonding
  • Materials for Prototype Assembly and Packaging

Nanotechnology

  • The Scanning Electron Microscope
  • Scanning Probe Microscopy
  • Nanoelectromechanical Systems
  • Langmuir-Blodgett Films
  • Bionanotechnology
  • Molecular Nanotechnology

Amplifiers and Filtering

  • Op-Amp
  • Instrumentation Amplifiers
  • Wheatstone Bridge
  • Filtering

Computer Interfacing

  • Driving Analog Devices from Digital Sources
  • Analog-to-Digital Conversion
  • Analog-to-Digital Converters

Output Drivers

Controlling Currents and Voltages with Op-Amps

  • Transistors
  • Relays
  • BJT Output Boost for Op-Amps
  • Optoisolators

    Index

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    Microengineering, MEMS, and Interfacing
    A Practical Guide
    by Daniel John Banks

    2006 352 pages $148.95 + shipping
    Texas residents please add 6.75 % sales tax
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