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Engineering Book from C.H.I.P.S.

Microfabrication and Nanomanufacturing
edited by Mark James Jackson

Microfabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials.

Features:

  • Provides an overview of techniques used in the semiconductor industry
  • Discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications and the construction of nanoscale components using established lithographic techniques
  • Details bulk and surface micromachining techniques used for etching, machining, and molding procedures and manufacturing techniques

Contents

  • Micro- and Nanofabrication
  • Microfabrication Using X-Ray Lithography
  • Etching, Machining, and Molding High-Aspect Ratio Microstructures
  • The Size Effect in Micromachining
  • Mechanical Micromachining
  • Precision Micro- and Nanogrinding
  • CVD Diamond Technology for Microtools, NEMS, and MEMS Applications
  • Laser-Based Micro- and Nanofabrication
  • Pulsed Water Drop Micromachining
  • Diamond Nanogrinding
  • Nanometric Machining: Theory, Methods, and Implementation
  • Nanocrystalline Diamond: Deposition Routes and Applications
  • Commercialization Issues of Micro-Nano Technology
  • The Future of Micro- and Nanomanufacturing

Index

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Microfabrication and Nanomanufacturing
edited by Mark James Jackson
2005 416 pages $138.95 + shipping
Texas residents please add 7 % sales tax

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