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Nanotechnology Book from C.H.I.P.S.

Plasma Electronics
Applications in Microelectronic Device Fabrication
by T. Makabe

Plasma Electronics explains the fundamental physics and numerical methods necessary to bring these technologies from the laboratory to the factory.

Features:

  • Presents a complete treatment of plasma characteristics, modeling methods, and applications
  • Examines major new developments and their transfer from research labs to industry
  • Includes emerging applications to nanotechnology
  • Provides many problems, worked examples, references, and illustrations to reinforce and clarify the concepts
  • Encompasses a scope not approached by any other reference on the subject

Contents

Introduction

  • Plasma and Its Classification
  • Application of Low-Temperature Plasma
  • Academic Fusion

Phenomenological Description of the Charged Particle Transport

  • Transport in Real (Configuration) Space
  • Transport in Velocity Space
  • Thermal Equilibrium and Its Governing Relations

Macroscopic Plasma Characteristics

  • Quasi-Neutrality
  • Charge-Separation in Plasmas
  • Plasma Shielding
  • Particle Diffusion
  • Bohm Sheath Criterion

Elementary Processes in Gas Phase and on Surfaces

  • Particles and Waves
  • Collisions and Cross Sections
  • Classical Collision Theory
  • Quantum Theory of Scattering
  • Collisions between Electrons and Neutral Atoms/Molecules
  • Electron-Atom Collisions
  • Electron-Molecule Collisions
  • Nonconservative Collisions of Electrons with Atoms and Molecules
  • Heavy Particle Collisions
  • Photons in Ionized Gases
  • Elementary Processes at Surfaces

The Boltzmann Equation and Transport Equations of Charged Particles

  • The Boltzmann Equation
  • Transport Coefficients
  • The Transport Equation
  • Collision Term in the Boltzmann Equation
  • Boltzmann Equation for Electrons

General Properties of Charged Particle Transport in Gases

  • Electron Transport in DC-Electric Fields
  • Electron Transport in RF Electric Fields
  • Ion Transport in DC-Electric Fields

Modeling of Nonequilibrium (Low-Temperature) Plasmas

  • Continuum Models
  • Particle Models
  • Hybrid Models
  • Circuit Model
  • Electromagnetic Fields and Maxwell's Equations

Numerical Procedure of Modeling

  • Time Constant of the System
  • Numerical Techniques to Solve the Time-Dependent Drift-Diffusion Equation
  • Boundary Conditions

Capacitively Coupled Plasma

  • Radio-Frequency Capacitive Coupling
  • Mechanism of Plasma Maintenance

Inductively Coupled Plasma

  • Radio-Frequency Inductive Coupling
  • Mechanism of Plasma Maintenance
  • Wave Propagation in Plasmas

Magnetically Enhanced Plasma

  • Direct-Current Magnetron Plasma
  • Unbalanced Magnetron Plasma
  • RF Magnetron Plasma
  • Magnetic Confinements of Plasmas
  • Magnetically Resonant Plasmas

Plasma Processing and Related Topics

  • Physical Sputtering
  • Plasma Chemical Vapor Deposition
  • Plasma Etching

Index

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Plasma Electronics
Applications in Microelectronic Device Fabrication
by T. Makabe

2006 360 pages $148.95 + shipping
Texas residents please add 6.75 % sales tax

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