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Semiconductor Technology Book from C.H.I.P.S.

Characterization
of Semiconductor Materials:
Principles
and Methods Volume 1

by Gary E. McGuire


This volume reviews the basic principles for a wide range of selected analytical techniques. It provides illustrative examples of applications taken from the semiconductor industry.

Characterization of Semiconductor Materials provides a unique resource for individuals working in this field.

Contents

  1. Electrical Characterization of Semiconductor Materials and Devices
    • Introduction
    • Four-Point Probe/Wafer Mapping
    • Defects
    • Recombination/Generation Lifetime
    • Deep Level Transient Spectroscopy
    • Doping Profiling

  2. Secondary Ion Mass Spectrometry
    • Principle of SIMS
    • Methodology
    • Mechanism of Secondary Ion Formation
    • Information Available
    • Instrumentation
    • Summary

  3. Photoelectron Spectroscopy: Applications to Semiconductors
    • Introduction
    • The Electron Photoemission Experiment
    • Trends in Instrumentation
    • Profiling Structures

  4. Ion/Solid Interactions in Surface Analysis
    • Introduction
    • Ion/Solid Interactions: Elemental Targets
    • Ion/Solid Interactions: Multielement Targets
    • Depth Profiling
    • Summary

  5. Molecular Characterization of Dielectric Films by Laser Raman Spectroscopy
    • Introduction
    • Theory: Description of the Method
    • Interpretation of Raman Spectra of Solids
    • Raman Instrumentation and Measurement Capability
    • Applications to Thin Film Characterization
    • Limitations of Raman Spectroscopy for Thin Film Characterization
    • Advanced Raman Characterization Techniques

  6. Characterization of Semiconductor Surfaces by Appearance Potential Spectroscopy
    • Introduction
    • Principle
    • Experimental
    • Applications
    • Conclusions
    • Glossary of Symbols

Index

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Characterization of Semiconductor Materials:
Principles and Methods Volume 1

by Gary E. McGuire
330 pages $132.00 + shipping

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