In CMOS - MEMS, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of MEMS is covered from all angles.

CMOS - MEMS introduces readers to this field and takes them from fabrication technologies and material characterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems.

Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first place, rather than having a hybrid solution.

Contents:

1. Fabrication technology
2. Material characterization
3. Monolithically integrated inertial sensors
4. CMOS-MEMS acoustic devices
5. RF CMOS MEMS
6. CMOS-based pressure sensors
7. CMOS-based chemical sensors
8. Biometric capacitive CMOS fingerprint sensor systems
9. CMOS-based biochemical sensing systems
10. CMOS-based thermal sensors
11. Circuit and system integration

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ORDER NOW CMOS - MEMS edited by Henry Baltes 2005 • 594 pages • $289.00 + shipping Texas residents please add 6.75 % sales tax