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Nanotechnology book from C.H.I.P.S.

CMOS - MEMS
edited by
Henry Baltes, et al.

In CMOS - MEMS, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of MEMS is covered from all angles.

CMOS - MEMS introduces readers to this field and takes them from fabrication technologies and material characterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems.

Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first place, rather than having a hybrid solution.

Contents:

  1. Fabrication technology
  2. Material characterization
  3. Monolithically integrated inertial sensors
  4. CMOS-MEMS acoustic devices
  5. RF CMOS MEMS
  6. CMOS-based pressure sensors
  7. CMOS-based chemical sensors
  8. Biometric capacitive CMOS fingerprint sensor systems
  9. CMOS-based biochemical sensing systems
  10. CMOS-based thermal sensors
  11. Circuit and system integration
Index

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CMOS - MEMS
edited by Henry Baltes

2005 594 pages $289.00 + shipping
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