Contamination and ESD Control in High Technology Manufacturing offers effective strategies and techniques for contamination and electrostatic discharge (ESD) control that can be implemented in a wide range of high-technology industries, including semiconductor, disk drive, aerospace, pharmaceutical, medical device, automobile, and food production manufacturing.

Features:

• Analysis methods for solving contamination and ESD problems
• Building the contamination and ESD control environment, including design and construction of cleanrooms and ESD protected environments
• Cleaning processes and the equipment needed to support these processes
• Tooling design and certification
• Continuous monitoring
• Consumable supplies and packaging materials
• Controlling contamination and ESD originating from people
• Management of cleanrooms and ESD protected workplace environments

Contents

Fundamentals of Contamination Control

• Glossary of Contamination Control Terms
• Specifying Contamination in Air and on Surfaces
• Sources of Contamination
• Contamination Control Requirements
• Pertinent Standards

Fundamentals of ESD Control

• Introduction and Historical Perspective
• Glossary of Electrostatic Charge Control Terms
• Sources of Electrostatic Charge
• Requirements of ESD Control
• Building the ESD-Safe Workplace
• ESD Controls for People
• Consumables and Accessories
• Personnel Equipment and Procedures for Its Use
• Transportation of ESD-Sensitive Products
• Inspections and Record Keeping
• ESD Control Program
• ESD and Contamination Control
• Useful Reference Standards

Sampling and Analysis Methods

• Classification of Analysis Methods
• Organic Contamination Analysis Methods
• Ionic and Inorganic Contamination Analysis Methods
• Electrostatic Discharge Methods
• Numerical Simulation
• Algebraic Predictive Modeling
• Statistical Analysis Methods

Facilities Design: Contamination

• Basics of Cleanroom Design
• Cleanrooms
• Cleanroom Construction and Operating Costs
• Modern Energy-Saving Approaches
• Other Design Considerations

Getting Clean Parts and Getting Parts Clean

• Gross and Precision Cleanliness Protocols
• Design for Manufacturability and Cleanability
• Process Design Guidelines
• Cleaning Processes
• Drying Processes
• Cost of Cleaning
• Vendor Process Contamination Checklist

Tooling Design and Certification

• Contamination and ESD Control Requirements
• Maintenance Requirements
• General Design Alternatives
• Materials
• Surface Treatments
• Selection and Evaluation of Components
• Tool and Workstation Layout
• Cleanroom Certification of Automated Tooling

Continuous Monitoring

• Continuous Contamination Monitoring
• Continuous Monitoring of Manufacturing
• Evaluation of In Situ Monitoring in an Aqueous Cleaning Application
• Antennas for Electrostatic Charge Monitoring

Consumable Supplies and Packaging Materials

• Cleanroom and ESD Gloves
• Functional vs. Nonfunctional Testing
• Glove Use Strategies
• Initial Qualification vs. the Need for Ongoing Lot Certification
• Glove Washing
• ESD Performance of Gloves
• Glove Laundering
• Wipers and Swabs

Controlling Contamination and ESD From People

• People as a Source of Contamination
• Typical Gowning Protocols
• Procedures for Entering a Cleanroom
• Behavior in a Cleanroom
• Procedures for Exiting a Cleanroom
• Relationship between Attire and Class Achieved
• Procedures for Entering an ESD-Safe Work Area
• Garments and Laundry Services

Layout of Change Rooms

• Principles of Efficient Change Room Design
• Case Studies: Change Rooms
• Entering the Cleanroom
• Exiting the Cleanroom

Procedures and Documentation

• Hierarchy of Documents and Audits
• Operator Self-Check
• Noninstrument Audits
• Instrument Audits
• Independent Audits
• Managing Use of the Audit Scorecard
• Typical Survey

Index

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