by Behraad Bahreyni
Fabrication and Design of Resonant Microdevices details the main fabrication, design, and application issues of micromachined resonant devices, and common techniques for processing the output signal of resonant MEMS.
Fabrication and Design of Resonant Microdevices is an accessible introduction to the main issues surrounding the creation and application of micromachined resonant devices.
Contents
- Frequency and Time Response of Resonance
- Micromaching and Scaling
1. Microfabrication
- Material Selection
- Lithography
- Film Growth and Deposition
- Etching
- Doping
- Bonding
- Planarisation
- Bulk vs. Surface Micromaching
- Examples of Process Flows
2. Transduction Mechanisms
- Electrostatic Transduction
- Piezoelectric Transduction
- Magnetic Transduction
- Thermal Actuation
- Piezoresistive Sensing
- Optical Sensing
- Other Techniques
3. Modelling of Statics
- Beamis under Longitudinal Stress
- Bending of Beams
- Deflections of Plates
4. Modelling of Dynamics
Lumped Systems
- Longitudinal Wave Propagation in Beams
- Flexural Waves in Beams
- Dynamics of Plates and Membranes
- Estimation of Resonant Frequency
- Bulk Resonators
- Simulation of Resonance
- Nonlinear Behaviour
5. Damping Mechanisms
- Viscous Damping
- Anchor Loss
- Thermoelastic Damping
- Surface Losses
6. Noise
- Noise Sources
- System Noise Representation
- Interference
- Quantifying Oscillator Noise
7. Interfacing
- Frequency Shift Measurement Techniques
- Oscillator Topologies
8. Packaging
- Maintaining Vacuum
- Packaging Stress
9. Survey of Applications
- Resonant Microsensors
- Signal Processing
- Time and Frequency References
Index
to see books • videos • cd-roms of related interest