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Engineering Book from C.H.I.P.S.

Fundamentals of Semiconductor Manufacturing and Process Control
by Gary S. May

Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems.

Features:

  • Combines process control and semiconductor manufacturing
  • Unique treatment of system and software technology and management of overall manufacturing systems
  • Chapters include case studies, sample problems, and suggested exercises

Contents

Introduction to Semiconductor Manufacturing

  • Modern Semiconductor Manufacturing
  • Goals of Manufacturing
  • Manufacturing Systems

Technology Overview

  • Unit Processes
  • Process Integration

Process Monitoring

  • Process Flow and Key Measurement Points
  • Wafer State Measurements
  • Equipment State Measurements

Statistical Fundamentals

  • Probability Distributions
  • Sampling from a Normal Distribution
  • Estimation
  • Hypothesis Testing

Yield Modeling

  • Definitions of Yield Components
  • Functional Yield Models
  • Functional Yield Model Components
  • Parametric Yield
  • Yield Simulation
  • Design Centering
  • Process Introduction and Time-to-Yield

Statistical Process Control

  • Control Chart Basics
  • Patterns in Control Charts
  • Control Charts for Attributes
  • Control Charts for Variables
  • Multivariate Control
  • SPC with Correlated Process Data

Statistical Experimental Design

  • Comparing Distributions
  • Analysis of Variance
  • Factorial Designs
  • Taguchi Method

Process Modeling

  • Regression Modeling
  • Response Surface Methods
  • Evolutionary Operation
  • Principal-Component Analysis
  • Intelligent Modeling Techniques
  • Process Optimization

Advanced Process Control

  • Run-by-Run Control with Constant Term Adaptation
  • Multivariate Control with Complete Model Adaptation
  • Supervisory Control

Process and Equipment Diagnosis

  • Algorithmic Methods
  • Expert Systems
  • Neural Network Approaches
  • Hybrid Methods

Index

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Fundamentals of Semiconductor Manufacturing and Process Control
by Gary S. May
2006 463 pages $89.95 + shipping
Texas residents please add 6.75 % sales tax

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