by Gary S. May
Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems.
Features:
- Combines process control and semiconductor manufacturing
- Unique treatment of system and software technology and management of overall manufacturing systems
- Chapters include case studies, sample problems, and suggested exercises
Contents
Introduction to Semiconductor Manufacturing
- Modern Semiconductor Manufacturing
- Goals of Manufacturing
- Manufacturing Systems
Technology Overview
- Unit Processes
- Process Integration
Process Monitoring
- Process Flow and Key Measurement Points
- Wafer State Measurements
- Equipment State Measurements
Statistical Fundamentals
- Probability Distributions
- Sampling from a Normal Distribution
- Estimation
- Hypothesis Testing
Yield Modeling
- Definitions of Yield Components
- Functional Yield Models
- Functional Yield Model Components
- Parametric Yield
- Yield Simulation
- Design Centering
- Process Introduction and Time-to-Yield
Statistical Process Control
- Control Chart Basics
- Patterns in Control Charts
- Control Charts for Attributes
- Control Charts for Variables
- Multivariate Control
- SPC with Correlated Process Data
Statistical Experimental Design
- Comparing Distributions
- Analysis of Variance
- Factorial Designs
- Taguchi Method
Process Modeling
- Regression Modeling
- Response Surface Methods
- Evolutionary Operation
- Principal-Component Analysis
- Intelligent Modeling Techniques
- Process Optimization
Advanced Process Control
- Run-by-Run Control with Constant Term Adaptation
- Multivariate Control with Complete Model Adaptation
- Supervisory Control
Process and Equipment Diagnosis
- Algorithmic Methods
- Expert Systems
- Neural Network Approaches
- Hybrid Methods
Index
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