by Sami Franssila
Introduction to Micro Fabrication shows how the common microfabrication concepts can be applied over and over again to create devices with a wide variety of structures and functions.
Introduction to Micro Fabrication features:
- A comprehensive presentation of basic fabrication processes
- An emphasis on materials and microstructures, rather than device physics
- In-depth discussion on process integration showing how processes, materials and devices interact
- A wealth of examples of both conceptual and real devices
Introduction to Micro Fabrication includes 250 homework problems for students to familiarise themselves with micro-scale materials, dimensions, measurements, costs and scaling trends.
Both research and manufacturing topics are covered, with an emphasis on silicon, which is the workhorse of microfabrication.
Contents:
- Introduction
- Introduction
- Micrometrology and materials characterization
- Simulation of microfabrication processes
- Materials
- Silicon
- Thin film materials and processes
- Epitaxy
- Thin-film growth and structure
- Basic Processes
- Pattern generation
- Optical lithography
- Lithographic patterns
- Etching
- Wafer cleaning and surface preparation
- Thermal oxidation
- Diffusion
- Ion implantation
- CMP : Chemical-mechanical polishing
- Bonding and layer transfer
- Molding and stamping
- Structures
- Self-aligned structures
- Plasma etched structures
- Wet-etched silicon structures
- Sacrificial and released structures
- Structures by deposition
- Integration
- Process integration
- CMOS transistor fabrication
- Bipolar technology
- Multilevel metallization
- MEMS process integration
- Processing on non-silicon substrates
- Tools
- Tools for microfabrication
- Tools for hot processes
- Vacuum and plasmas
- Tools for CVD and epitaxy
- Integrated processing
- Manufacturing
- Cleanrooms
- Yield
- Wafer fab
- Future
- Moore's law
- Microfabrication at large
Index
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