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Nanoelectronics book from C.H.I.P.S.

Introduction to Micro Fabrication
by Sami Franssila

Introduction to Micro Fabrication shows how the common microfabrication concepts can be applied over and over again to create devices with a wide variety of structures and functions.

Introduction to Micro Fabrication features:

  • A comprehensive presentation of basic fabrication processes
  • An emphasis on materials and microstructures, rather than device physics
  • In-depth discussion on process integration showing how processes, materials and devices interact
  • A wealth of examples of both conceptual and real devices
Introduction to Micro Fabrication includes 250 homework problems for students to familiarise themselves with micro-scale materials, dimensions, measurements, costs and scaling trends.

Both research and manufacturing topics are covered, with an emphasis on silicon, which is the workhorse of microfabrication.

Contents:

  1. Introduction
    1. Introduction
    2. Micrometrology and materials characterization
    3. Simulation of microfabrication processes

  2. Materials
    1. Silicon
    2. Thin film materials and processes
    3. Epitaxy
    4. Thin-film growth and structure

  3. Basic Processes
    1. Pattern generation
    2. Optical lithography
    3. Lithographic patterns
    4. Etching
    5. Wafer cleaning and surface preparation
    6. Thermal oxidation
    7. Diffusion
    8. Ion implantation
    9. CMP : Chemical-mechanical polishing
    10. Bonding and layer transfer
    11. Molding and stamping

  4. Structures
    1. Self-aligned structures
    2. Plasma etched structures
    3. Wet-etched silicon structures
    4. Sacrificial and released structures
    5. Structures by deposition

  5. Integration
    1. Process integration
    2. CMOS transistor fabrication
    3. Bipolar technology
    4. Multilevel metallization
    5. MEMS process integration
    6. Processing on non-silicon substrates

  6. Tools
    1. Tools for microfabrication
    2. Tools for hot processes
    3. Vacuum and plasmas
    4. Tools for CVD and epitaxy
    5. Integrated processing

  7. Manufacturing
    1. Cleanrooms
    2. Yield
    3. Wafer fab

  8. Future
    1. Moore's law
    2. Microfabrication at large
Index

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Introduction to Micro Fabrication
by Sami Franssila

401 pages $169.00 + shipping
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