Microengineering, MEMS, and Interfacing provides a straightforward, down-to-earth overview of the current state of MEMS technology.

Features:

• Presents a non-technical introduction to MEMS fabrication, design, and integration techniques for application in a variety of areas
• Covers mask design and silicon micromachining in detail
• Offers qualitative comparisons of many materials and processes (both silicon and nonsilicon)
• Includes abundant line drawings and micrographs to illustrate the discussion
• Devotes a chapter to nanotechnology and its relation to the current state of microengineering

Contents

Photolithography

• UV Photolithography
• X-Ray Lithography
• Direct-Write (E-Beam) Lithography
• Low-Cost Photolithography
• Photolithography-Key Points

Silicon Micromachining

• Silicon
• Crystal Growth
• Doping
• Wafer Specifications
• Thin Films
• Structures in Silicon
• Wafer Dicing

Nonsilicon Processes

• Chemical-Mechanical Polishing
• LIGA and Electroplating
• Photochemical Machining
• Laser Machining
• Polymer Microforming
• Electrical Discharge Machining
• Photostructurable Glasses
• Precision Engineering

Mask Design

• Minimum Feature Size
• Layout Software
• Design
• Design Rules
• Getting the Masks Produced
• Generating Gerber Files
• Mask Design-Key Points

Microsensors

• Thermal Sensors
• Radiation Sensors
• Magnetic Sensors
• Chemical Sensors and Biosensors
• Microelectrodes for Neurophysiology
• Mechanical Sensors

Microactuators

• Electrostatic Actuators
• Magnetic Actuators
• Piezoelectric Actuators
• Thermal Actuators
• Hydraulic Actuators
• Multilayer Bonded Devices
• Microstimulators

Micro Total Analysis Systems

• Basic Chemistry
• Applications of Microengineered Devices in Chemistry and Biochemistry
• Micro Total Analysis Systems
• DNA Chips
• The Polymerase Chain Reaction (PCR)
• Conducting Polymers and Hydrogels

Integrated Optics

• Waveguides
• Integrated Optics Components
• Fiber Coupling

Assembly and Packaging

• Assembly
• Passivation
• Prepackage Testing
• Packaging
• Wire Bonding
• Materials for Prototype Assembly and Packaging

Nanotechnology

• The Scanning Electron Microscope
• Scanning Probe Microscopy
• Nanoelectromechanical Systems
• Langmuir-Blodgett Films
• Bionanotechnology
• Molecular Nanotechnology

Amplifiers and Filtering

• Op-Amp
• Instrumentation Amplifiers
• Wheatstone Bridge
• Filtering

Computer Interfacing

• Driving Analog Devices from Digital Sources
• Analog-to-Digital Conversion
• Analog-to-Digital Converters

Output Drivers

Controlling Currents and Voltages with Op-Amps

Optoisolators

Index

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ORDER NOW Microengineering, MEMS, and Interfacing A Practical Guide by Daniel John Banks 2006 • 352 pages • $148.95 + shipping Texas residents please add 6.75 % sales tax