Plasma Electronics explains the fundamental physics and numerical methods necessary to bring these technologies from the laboratory to the factory.

Features:

• Presents a complete treatment of plasma characteristics, modeling methods, and applications
• Examines major new developments and their transfer from research labs to industry
• Includes emerging applications to nanotechnology
• Provides many problems, worked examples, references, and illustrations to reinforce and clarify the concepts
• Encompasses a scope not approached by any other reference on the subject

Contents

Introduction

• Plasma and Its Classification
• Application of Low-Temperature Plasma
• Academic Fusion

Phenomenological Description of the Charged Particle Transport

• Transport in Real (Configuration) Space
• Transport in Velocity Space
• Thermal Equilibrium and Its Governing Relations

Macroscopic Plasma Characteristics

• Quasi-Neutrality
• Charge-Separation in Plasmas
• Plasma Shielding
• Particle Diffusion
• Bohm Sheath Criterion

Elementary Processes in Gas Phase and on Surfaces

• Particles and Waves
• Collisions and Cross Sections
• Classical Collision Theory
• Quantum Theory of Scattering
• Collisions between Electrons and Neutral Atoms/Molecules
• Electron-Atom Collisions
• Electron-Molecule Collisions
• Nonconservative Collisions of Electrons with Atoms and Molecules
• Heavy Particle Collisions
• Photons in Ionized Gases
• Elementary Processes at Surfaces

The Boltzmann Equation and Transport Equations of Charged Particles

• The Boltzmann Equation
• Transport Coefficients
• The Transport Equation
• Collision Term in the Boltzmann Equation
• Boltzmann Equation for Electrons

General Properties of Charged Particle Transport in Gases

• Electron Transport in DC-Electric Fields
• Electron Transport in RF Electric Fields
• Ion Transport in DC-Electric Fields

Modeling of Nonequilibrium (Low-Temperature) Plasmas

• Continuum Models
• Particle Models
• Hybrid Models
• Circuit Model
• Electromagnetic Fields and Maxwell's Equations

Numerical Procedure of Modeling

• Time Constant of the System
• Numerical Techniques to Solve the Time-Dependent Drift-Diffusion Equation
• Boundary Conditions

Capacitively Coupled Plasma

• Radio-Frequency Capacitive Coupling
• Mechanism of Plasma Maintenance

Inductively Coupled Plasma

• Radio-Frequency Inductive Coupling
• Mechanism of Plasma Maintenance
• Wave Propagation in Plasmas

Magnetically Enhanced Plasma

• Direct-Current Magnetron Plasma
• Unbalanced Magnetron Plasma
• RF Magnetron Plasma
• Magnetic Confinements of Plasmas
• Magnetically Resonant Plasmas

Plasma Processing and Related Topics

• Physical Sputtering
• Plasma Chemical Vapor Deposition
• Plasma Etching

Index

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