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Electrical Engineering book from C.H.I.P.S.

Semiconductor Manufacturing Handbook
by Hwaiyu Geng

Written by 60 international experts, and peer reviewed by a seasoned advisory board, Semiconductor Manufacturing Handbook covers the fundamentals of relevant technology and its real-life application and operational considerations for planning, implementing, and controlling manufacturing processes.

Semiconductor Manufacturing Handbook includes hundreds of detailed illustrations and a list of relevant books, technical papers, and websites for further research.

This inclusive, wide-ranging coverage makes Semiconductor Manufacturing Handbook the most comprehensive single-volume reference ever published in the field.

Contents:

  1. How semiconductor chips are made
  2. IC design
  3. Silicon substrates for semiconductor manufacturing
  4. Copper, low-[kappa] dielectrics, and their reliability
  5. Fundamentals - silicide formation on Si
  6. Plasma process control
  7. Vacuum technology
  8. Photomask
  9. Microlithography
  10. Ion implantation and rapid thermal processing
  11. Wet etching
  12. Plasma etching
  13. Physical vapor deposition
  14. Chemical vapor deposition
  15. Epitaxy
  16. ECD fundamentals
  17. Chemical mechanical planarization
  18. Wet cleaning
  19. Inspection, measurement, and test
  20. Grinding, stress relief, and dicing
  21. Packaging
  22. Nanotechnology and nanomanufacturing
  23. Fundamentals of microelectromechanical system
  24. Flat-panel display technology and manufacturing
  25. Specialty gas and CDA systems
  26. Waste gas abatement systems
  27. PFC abatement
  28. Chemical and slurry handling systems
  29. Fluid handling components for high purity liquid chemicals and slurries
  30. Fundamentals of ultrapure water
  31. Yield management
  32. Automated material handling system
  33. CD metrology and CD-SEM
  34. Six Sigma
  35. Advanced process control
  36. Environmental, health, and safety considerations in semiconductor fabrication facilities
  37. Plan, design, and construction of a FAB
  38. Cleanroom design and construction
  39. Micro-vibration and noise design
  40. ESD controls in cleanroom environments
  41. Airborne molecular contamination
  42. Particle monitoring in semiconductor manufacturing
  43. Wastewater neutralization systems
Index

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Semiconductor Manufacturing Handbook
by Hwaiyu Geng

2005 800 pages $149.00 + shipping
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