Thin Film Materials Technology: Sputtering of Compound Materials

by Kiyotaka Wasa et al

This book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering. It contains the newest experimental and technological information about ceramic thin films, a key technology for nanomaterials in high-speed information applications and large-area functional coatings.

The principles and examples thoroughly cover making thin film materials and devices for diverse applications:

• Nanometer composite thin films, nanometer superlattice of compound ceramics, superconductors
• Microsensors and actuators, micro-MEMS
• Mobile/compact/flexible ferroelectric memory, flat displays including plasma displays and PLDs
• Thin film catalysis, solar battery, and large-area functional window glass coating for energy and environmental uses
• Automotive parts coatings, non-peel plastics coatings with metal, alloy, and compound films

Thin Film Materials Technology is an invaluable resource for scientists, engineers, and graduate students in the semiconductor, energy, environment, vehicle, medical, and food industries.

Contents

1. Thin Film Materials and Devices
2. Thin Film Processes
3. Sputtering Phenomena
4. Sputtering Systems
5. Deposition of Compound Thin Films
6. Structural Control of Compound Thin Films: Perovskite and Nanometer Oxide Thin Films
7. Microfabrication by Sputtering

Appendix
List of Acronyms
Index

click here to see books • videos • cd-roms of related interest